发明名称 SEMICONDUCTOR DEVICE HAVING SILICIDE LAYER FOR CONNECTING GATE AND DRAIN AND MANUFACTURING METHOD THEREOF
摘要 PURPOSE: A semiconductor device and a method for fabricating the same are to prevent a void from being generated in a contact hole, and ensure an overlap margin in forming a butting contact for bridging a gate and a drain. CONSTITUTION: A gate(32) is formed on a silicon substrate(30) with a gate oxide layer(31) formed thereon. The gate is formed of silicon. A source(33A) and a drain(33B) are formed in the silicon substrate on both ends of the gate by performing the first ion implantation process. The first metal pattern is formed to bridge the gate and the drain. An insulating spacer is formed on the sidewall of the gate. The source and the drain are formed in the silicon substrate on both ends of gate by performing the second ion implantation process. The second metal layer is formed on the entire structure. The first metal pattern is transformed into the first silicide layer(34A) by an annealing process. The second silicide layer is formed on the surfaces of the source and the drain.
申请公布号 KR20010061532(A) 申请公布日期 2001.07.07
申请号 KR19990064028 申请日期 1999.12.28
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, WON HO
分类号 H01L21/336;(IPC1-7):H01L21/336 主分类号 H01L21/336
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