| 摘要 |
PROBLEM TO BE SOLVED: To provide a frequency adjusting device for a piezoelectric element which is improved in adjusting speed by increasing an etching current by generating auxiliary plasma of high density nearby the piezoelectric element and decreasing plasma impedance viewed from the piezoelectric element. SOLUTION: A magnet 203 is provided nearby a crystal vibrator 100 and an auxiliary electrode 201 as a cathode is equipped with a gap 204 at the cathode tip part nearby the crystal vibrator 100, and the auxiliary cathode 201 is connected to the negative potential of an auxiliary DC power source 202. High-density plasma is generated in the gap and supplied to the surface electrode of the crystal vibrator. |
