| 摘要 |
PURPOSE: A dry etching system is provided to prevent a crack of a natural oxide coating layer due to a discharge phenomenon within a chamber by forming uniformly a natural oxide coating layer on a bear electrode. CONSTITUTION: A natural oxide coating layer is formed on a bottom face of an upper electrode(60) contacted with a discharge space. A multitude of hole(64) is formed to guide an internal gas to the discharge space. A multitude of screw joint hole(68) is formed on an edge of the bottom face. A natural oxide coating layer(62) is formed uniformly on a surface of an AI bear electrode(60). The natural oxide coating layer(62) prevent an oxidation of the AI bear electrode(60).
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