HEAT ABSORBING MATERIAL FOR INFRARED SENSOR AND ITS FORMING METHOD

摘要

PURPOSE: To lower a thermal loss to efficiently increase temperature of a heat sensitive part by improving a film forming shape of an infrared absorbing material. CONSTITUTION: This infrared absorbing material formed on the surface of the heat sensitive part 1 is formed into a shape in which a film thickness of the pattern edge part is thicker than that in the pattern central part, to reduce heat conductance of a heat conducting path running from the vicinity of the absorbing material central part to a heat sink 3 via the absorbing material edge part.