发明名称 METHOD FOR CUTTING CYLINDRICAL WORKPIECE AND HOLDING TOOL FOR USE THEREIN
摘要 PROBLEM TO BE SOLVED: To provide a method for cutting a cylindrical workpiece which can restrict a relative oscillation between a wire and the cylindrical workpiece and can prevent cracks of a wafer; and a holding tool for use therein. SOLUTION: This method for cutting a cylindrical workpiece can restrict abruptly an increase in cutting resistance to be generated at the time of simultaneous cutting start of the cylindrical workpiece 1 and a holding tool 10. The holding tool 10 comprises a recess 12 in correspondence to a curved face profile of the cylindrical workpiece 1 for fixing the cylindrical workpiece 1 by use of adhesives; and edges 14a, 14b provided at both ends of the recess 12 for receiving adhesives overflowed from the recess 12, and the edges 14a, 14b are provided with a cutting end point (E-E) and forward of a wire of the recess 12.
申请公布号 JP2001185513(A) 申请公布日期 2001.07.06
申请号 JP19990364509 申请日期 1999.12.22
申请人 MEMC KK 发明人 KATANO TAKU;INABA AKIHIRO
分类号 B24B27/06;B24B41/06;H01L21/304;(IPC1-7):H01L21/304 主分类号 B24B27/06
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