| 摘要 |
PROBLEM TO BE SOLVED: To improve equipment for micro-lithographic projection printing device with a slotlike image field or a rotationally a symmetric illumination. SOLUTION: This system includes a light source (30) and at least one optical member, in particular, a lens or a mirror. It is at least one surface region illuminated by the radiation from the light source (30), and the optical member is substantially symmetric around a rotational symmetry axis (5). The optical member or its housing (6) is connected to a frame (7) rotatably by at least one of bearings (8, 9, 10). An actuator (18) rotates an optical member (25) or its housing (6) around the rotationary symmetric axis (5). A control unit actuate the actuator (18) to rotate at least temporarily the optical member while it is exposed to the illumination. |
