| 摘要 |
PROBLEM TO BE SOLVED: To assure a predetermined gas sensitivity even by an ultra-thin film gas sensor having an interval of sensing electrodes of 200μm. SOLUTION: After the sensing electrodes 6 are formed, the surfaces of the electrodes 6 are cleaned by irradiating with an ultraviolet ray. Then, a sensing film 7 is formed. Contact resistance between the sensing film and the electrodes is reduced, and the predetermined gas sensitivity is assured.
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