| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing liquid supply device which is reduced in driving power for piercing of a sealing member of a container, reduces the outflow resistance of a processing liquid after the piercing of the sealing member and does not substantially allow the processing liquid to remain. SOLUTION: The container into which the processing liquid is introduced from apertures 20a, 21a, 22a and 23a and which is sealed by the sealing member 35 is used. The container is held in an immobile state and is pierced to a circular shape 35a allowing part of the sealing member 35 to remain. The container is pierced with a piercing body 45 provided with blade edges 62 and 63 and valley parts 64 and 65 in order to store the processing liquid therein.
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