APPARATUS AND METHOD FOR INSPECTING FLAW

摘要

PROBLEM TO BE SOLVED: To provide a review method and a review apparatus capable of simply confirming fine flaws of an object to be inspected. SOLUTION: Reflected light from an object to be inspected is detected under bright field illumination to form a bright field image of the object to be inspected, and scattered light from the object to be inspected is detected under dark field illumination to form a dark field image of the object to be inspected, and the dark and bright field images of the object to be inspected are displayed on a display device at the same time to confirm the flaw of the object to be inspected. The dark field image can show a minute flaw as compared with the bright field image and an inspector compares both images to confirm the presence of minute flaws incapable of being shown by the bright field image.