COATING FILM INSPECTION APPARATUS AND INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a inspection apparatus and inspection method for accurately and quickly evaluating the performance of a coating film of an optical part. SOLUTION: This coating film inspection film apparatus for inspecting the coating film 28 of an optical part for ultraviolet light is provided with a inspection light radiating device 43 for applying inspection light 45 to the coating film 28 of the optical part, and a non-contact thermometer 48 for measuring the temperature of the coating film 28 to test the coating film 28 according to a temperature change of the coating film 28. The apparatus is provided with a light intensity measuring device for measuring the intensity of scattered light 35 irregularly reflected from the coating film 28 to inspect the coating film 28 according to the intensity of the scattered light 35.