| 摘要 |
PROBLEM TO BE SOLVED: To avoid an unstable control. SOLUTION: A real flow rate control valve opening/flow rate conversion means 6 calculates a real flow rate control valve opening signal in accordance with conversion characteristic between the opening of a flow rate control valve and a flow rate and outputs a real flow rate signal. A flow rate/flow rate control valve opening conversion means 3 inputs a flow rate command value signal and outputs a flow rate control valve opening signal in accordance with the conversion characteristic between the flow rate and the flow rate control valve opening. A pulse generation execution condition detection means 7 generates a pulse control signal within prescribed time when a flow rate control valve opening command A signal to be a deviation signal between the flow rate control valve opening signal and the real flow rate control valve opening signal is out of a prescribed range and outputs the pulse control signal to an operation means 9 for operating the opening of the flow rate control valve. When the flow rate control valve opening command A signal is included within the prescribed range, an error correction control A means 11 outputs a pulse control signal whose manipulated variable is smaller than the pulse control signal to the operation means 9 in accordance with an error A signal so that the error A signal is included within a prescribed convergence range.
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