FLOW SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a flow sensor capable of measuring up to a high flow region with a simple structure. SOLUTION: In a thin film structure part 2 on the cavity part of a substrate 1, a meandering heater 3 and a temperature sensing element 5 are formed. A fluid thermometer 4 is formed on the substrate 1. A nearest part to the temperature sensing element 5 of the heater 3 has a closer interval than the other parts.