METHOD FOR MANUFACTURING THIN-FILM COIL ELEMENT

摘要

PROBLEM TO BE SOLVED: To obtain a method for manufacturing a thin-film coil element which can manufacture thin-film coils of a large film thickness. SOLUTION: A photoresist film is formed on a frame layer 3 formed on a substrate 1 and is patterned. Spiral recessed parts 3 are formed at the frame layer 3 by etching using the patterned photoresist film as a mask and conductor layers are formed in these recessed parts 3a, by which the spiral thin-film coils 12 are formed.