EXPORSURE PROJECTION EQUIPMENT

摘要

PURPOSE: To provide equipment that controls a pattern without taking a spatial frequency filter out of a projection lens system. CONSTITUTION: In a projection lens system 10 a spatial frequency filter 103 is arranged on the pupil aperture. The equipment includes a liquid crystal element controller 15b and a filter information storage part 16b as means to control the spatial frequency filter 103. Patterns required for the spatial frequency filter 103 are transferred from the filter information storage part 16b to the liquid crystal element controller 15b. The transmittance and the phase difference of the spatial frequency filter 103, are simulated in advance at the design phase, and the modes of application of voltage to the liquid crystal element are determined based on these data and they are stared in the filter information storage part 16b.