| 摘要 |
PURPOSE: A transformation illuminating system is provided to improve the contrast of light and the resolution of the light, by obviating the interference between lights degrading the contrast when the lights diffracted through a mask is overlapped. CONSTITUTION: A transformation illuminating system includes a light source(51). An aperture(53) selectively transmits the light from the light source(51) through a plurality of poles. A reflection mirror(57) reflects the light through the aperture(53) toward a mask(59). A focusing lens(61) focuses only the lights passed through the mask(59) to illuminate them toward a wafer(W). The aperture(53) is formed to allow the lights passed through the poles to have different phases.
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