| 摘要 |
PROBLEM TO BE SOLVED: To sensitively and exactly detect angular velocity. SOLUTION: Plane vibrators 5 are arranged face to face on surfaces by way of an interval in X and Y two dimensional directions of a solid substrate 2. The plane vibrator 5 is a combined body in which vibrators 7 are connected with a connection beam 8 inside a frame 6. Whole plane vibrator 5 is excited and vibrated by an exciter consisting of a movable side comb electrode 14 and a solid side comb electrode 15 in X-direction. The gap between the frame 6 and the vibrator 7 is narrowed to interval (d) suppressing X-direction vibration and tortional vibration of the vibrator 7 against the frame 6 by the air dumping. Unnecessary vibration of the vibrator 7 during driving the angular velocity sensor 1 is suppressed, the detection sensitivity of the angular velocity sensor 1 is raised and the reliability of exactness can be improved. |
