| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma mass filter which effectively separates low-mass charged particles from high-mass charged particles, has variable parameters which permit for the operator to select a boundary between low-mass particles and high-mass particles, and is easy to use, with a relatively simple manufacture, and comparatively cost effective. SOLUTION: The mass-separating filter 10 has a chamber 14 which is surrounded by a wall 12 and which forms an axis 16. Around the outside of the wall 12 is plural magnetic coils 18 which generate a magnetic field Bz. Plural voltage control rings 20 generate electric filed Er and make crossing magnetic and electric fields along with the magnetic field. Multiple species plasma 24 including low mass charged particles 28 and high mass charged particles 26 are injected into the chamber 14. By the effect of the crossing magnetic and electric fields, particles 28, 26 rotate at orbits of particles being characteristic of the mass of the particle around the axis 16. The low mass charged particles 28 pass through the chamber 14 but the high mass charged particles 26 can not pass through the chamber 14 and are collected at the wall 12. By this way, there can be effectively separated the low mass charged particles 28 and the high mass charged particles 26. |
