| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray analyzer adapted to the measurement of a low energy X-ray by suitable energy resolution with a small dose load to a sample by obtaining a suitable positional resolution of a sample with a relatively simple constitution. SOLUTION: The X-ray analyzer X-ray analyzes by a fluorescent radiation energy disperse detection. To execute the measurement by the suitable positional resolution, an analyzing radioactive ray is transmitted to the sample by an X-ray transmission capillary tube directed toward the s ample through the surface of a detector. In such a disposition, substantially all the fluorescent X-rays can be detected from the sample. In this analyzer, as the detector, an X-ray sensitive CCD array is used. Such a CCD array supplies better energy resolution than that of a conventional EDX detector. Further, a large quantity of elaborate software is usable for such a CCD array to read. Then, such a CCD array can, for example, be immediately obtained as a visible light ray sensitivity array to be useless by lacking several pixels.
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