发明名称 |
DISPLACEMENT MEASURING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a displacement measuring device superior in durability in which gap adjustments are easy and which indicates slide characteristics. SOLUTION: In a static-capacitance-type encoder with a scale member 1 and sensor head 2 opposed to the scale member 1 in such a way as to be relatively moved, sliding films 24 worked into a predetermined pattern are arranged at a plurality of locations in a flat surface avoiding the transmitting electrode part 21 and receiving electrode parts 22 of the sensor head 2.
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申请公布号 |
JP2001183163(A) |
申请公布日期 |
2001.07.06 |
申请号 |
JP19990373452 |
申请日期 |
1999.12.28 |
申请人 |
MITSUTOYO CORP |
发明人 |
ADACHI SATOSHI;NAKAYAMA KENICHI;TAKAHASHI TETSUTO;HASEGAWA TOSHIHIRO;NAGATA MASAAKI |
分类号 |
G01B7/00;G01B11/00;G01D5/12;G01D5/241;(IPC1-7):G01D5/12 |
主分类号 |
G01B7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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