| 发明名称 |
SYSTEM AND METHOD FOR COLLECTING GAS |
| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce cost required for collecting PFC and environment load. SOLUTION: Gas comprising PFC is separated into PFC and other gas by a cooling mechanism trap 101 before it is diluted by nitrogen gas. A temporary storage mechanism 102 temporarily stores separated PFC to concentration by which efficient collection can be conducted and it is packed into a temporarily stored PFC cylinder.</p> |
| 申请公布号 |
JP2001185539(A) |
申请公布日期 |
2001.07.06 |
| 申请号 |
JP19990368269 |
申请日期 |
1999.12.24 |
| 申请人 |
TOSHIBA CORP |
发明人 |
SAKAI ITSUKO;OUCHI JUNKO;OIWA NORIHISA;HAYASAKA NOBUO;OKUMURA KATSUYA |
| 分类号 |
B01D53/68;B01D8/00;B01D53/00;C23C16/44;H01L21/02;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306 |
主分类号 |
B01D53/68 |
| 代理机构 |
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代理人 |
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| 地址 |
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