| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive planar type light amplifying element with high functionality in which erbium is uniformly doped by using an aerosol process and a method for manufacturing this light amplifying element. SOLUTION: An under-clad layer 20 is adhered on a silicon substrate 10, and a core layer is adhered on the under-clad layer 20 through an aerosol process, and the core layer is etched so that a core 30 can be prepared, and an over-clad layer 40 is formed on the under-clad layer 20 and the core 30 through the aerosol process. In this case, a large amount of P2O5 and a small amount of Na2O is doped to the core, and the covalent bond of SiO2 is disconnected so that a large amount of erbium can be doped to the core without generating clustering. |
