发明名称 METHOD AND APPARATUS USING RATE EQUATION FOR SIMULATION OF CURRENT IN MOS DEVICE
摘要 PURPOSE: A method and apparatus is provided to exclude causes reducing the reliability of a semiconductor device such as a MOSFET device. CONSTITUTION: A rate equation indicates quantitatively the electric movement including the migration and the current of electrons between boundaries generated by a difference when a source and a channel are doped. The quantitative value of the electric movement is not precise when a doping level is not known. The MOSFET devices which indicate a more desirable electric movement can be designed. By using the rate equation, the movement of the MOSFET element can be simulated in a computer simulation program.
申请公布号 KR20010060250(A) 申请公布日期 2001.07.06
申请号 KR20000065162 申请日期 2000.11.03
申请人 LUCENT TECHNOLOGIES INC. 发明人 MATTIA JOHN-PAUL
分类号 H01L29/00;G06F17/50;H01L21/336;H01L29/78;(IPC1-7):H01L27/092 主分类号 H01L29/00
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