APPARATUS FOR OPENING/CLOSING DOOR OF SEMICONDUCTOR WAFER CASSETTE

摘要

PURPOSE: An apparatus for opening/closing a door of a semiconductor wafer cassette is provided to prevent particles from entering the cassette by an operation of a transfer plate, by making the transfer plate move in a straight line when the door opens/closes. CONSTITUTION: A transfer unit fixes a door of a cassette by sucking air. At least one door key opens/closes the door of the cassette, mounted on one surface of the transfer unit. At least one revolutionary power supplying unit supplies revolutionary power for opening/closing the door of the cassette to the respective door key, mounted on the other surface of the transfer unit. A transfer power supplying unit supplies direct motion transfer power going back and forth to the transfer unit, mounted in the other portion of the transfer unit. The transfer power supplying unit is mounted in the supporting unit. A moving unit vertically moves up/down the supporting unit, mounted in a lower portion of the supporting unit.