| 摘要 |
PROBLEM TO BE SOLVED: To speedily and accurately measure shape characteristic values, representing features of the mask pattern shape of a phoromak, from the profile of the pattern. SOLUTION: A mask pattern image 1 for measuring a pattern shape is read in a computer, profile data 3 are generated through an image process 2 and then scanned to perform conversion into vector data 5, and a connecting and composing process 6 is further carried out to perform conversion into line drawing data 7; and a coordinate measuring process 8 is carried out for the line drawing data, so that shape characteristic values 9 can be measured. |
