| 摘要 |
PROBLEM TO BE SOLVED: To provide a shelf management system for semiconductor equipment which enables an efficient utilization of shelf for storing reference wafers and also makes it possible to stop progress of manufacturing control of a product lot when the measurement data of the reference wafer shows an abnormality, and its method. SOLUTION: A production control system for manufacturing line control equipped with a function to change an article name of reference wafer. At the production control system a plurality of reference wafers are given a common representative article name predetermined. On storing a plurality of reference wafers in a storage shelf, the reference wafers are stored on the storage shelf collectively without classifying them according to processing conditions in wafer process equipment. Each reference wafer is changed its name to an article name corresponding to the processing conditions when it is processed in the wafer process equipment.
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