| 摘要 |
PROBLEM TO BE SOLVED: To observe a semiconductor wafer in a high resolution using a low acceleration voltage, in particular enable to observe a vafer at the time of a large angle of inclination in a high resolution. SOLUTION: This device is a complex lens having a single pole magnetic field type lens 4 and an electrostatic lens 3, and electrode of tbe electrostatic lens 3 opposing to a wafer is made from a magnetic material, and a negative high voltage is applied to the electrode and the wafer. In the case the wafer is inclined, a failure of focal point/axis is not generated.
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