发明名称 |
Electrically heated substrate with multiple ceramic parts each having different volume resitivities |
摘要 |
A heater comprising a substrate having a heating surface to treat a substance to be heated on the substrate, a heating element embedded in the substrate, and a resistance control part, wherein the substrate comprises a first ceramic material and the resistance control part comprises a second ceramic material which has higher volume resistivity than that of the first ceramics.
|
申请公布号 |
US2001006172(A1) |
申请公布日期 |
2001.07.05 |
申请号 |
US20010753481 |
申请日期 |
2001.01.03 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
KATSUDA YUJI;ARAKI KIYOSHI;OHASHI TSUNEAKI |
分类号 |
H05B3/20;C04B35/00;H01L21/205;H01L21/683;H05B3/28;H05B3/74;(IPC1-7):H01L21/205 |
主分类号 |
H05B3/20 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|