| 摘要 |
PURPOSE: A method for manufacturing an environmental gas having a low dew point is provided which controls very low dew points and has superior control accuracy. CONSTITUTION: In a method for manufacturing an environmental gas by mixing saturated gas and dried gas, the method comprises the processes of generating minute bubbles (10) by installing a plurality of bubble micronizing filters (7) at a branch pipe inner side of a water tank (1); installing a water level gauge (202) at one side of the upper part of the water tank so that signals sensed at the water level gauge are feedback controlled by a water level controller (200) each solenoid valves (201a,201b) of which are adhered to one side of the upper part of the water tank; circulating water by installing a circulator (104) so that a water temperature feedback controlled by a water temperature controller (100) is furthermore homogenized; supplying the heated gas to a gas mixer (9) after heating a produced saturated gas (5) in a gas heater (8a), and manufacturing an environmental gas by mixing the saturated gas with a dried gas supplied from a branch pipe of a dry gas supplying pipe (4); and installing a gas mixer so that gases having different properties are homogeneously mixed and a dew point measuring instrument (304) measuring a dew point of the manufactured environmental gas, and directly feedback controlling a saturated gas flow rate control valve (303a) and a dried gas flow rate control valve (303b) with a dew point controller (300) by receiving signals from the dew point measuring instrument (304).
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