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经营范围
发明名称
Plasmabehandlungsvorrichtung
摘要
申请公布号
DE19739894(C2)
申请公布日期
2001.07.05
申请号
DE19971039894
申请日期
1997.09.11
申请人
MUEGGE ELECTRONIC GMBH
发明人
BAUMGAERTNER, KLAUS MARTIN;MUEGGE, HORST;RAEUCHLE, EBERHARD;RAEUCHLE, FRITZ KONSTANTIN
分类号
H01J37/32;(IPC1-7):H01J37/32;H05H1/46
主分类号
H01J37/32
代理机构
代理人
主权项
地址
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