Pressure measurement element is component of semiconductor wafer whose base surface is fully joined to body of same or approximately same dimensions, different coefficient of elasticity

摘要

The device has a piezoresistive semiconducting element (3) that is a component of a semiconductor wafer (2) whose base surface is fully joined to a body (4). The base surface of the wafer and the body are of the same or approximately the same dimensions and their coefficients of elasticity are different. The wafer can consist of monocrystalline silicon or silicon carbide.