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经营范围
发明名称
Strahlapparat für geladene Teilchen
摘要
申请公布号
DE69613050(D1)
申请公布日期
2001.07.05
申请号
DE19966013050
申请日期
1996.06.27
申请人
HITACHI, LTD.
发明人
KUROSAKI, TOSHIEI
分类号
H01J37/20;H01J37/22;H01J37/28;H01L21/027;(IPC1-7):H01J37/22
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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