| 摘要 |
<p>A low-cost, small-sized ink-jet record head is manufactured with accuracy using a thin-film process technology. A piezoelectric layer and an electrode layer are sequentially formed on a substrate by a thin-film process. The electrode and the piezoelectric layer are simultaneously etched by ion milling to form energy generation elements for generating energy to spray ink. Particle receivers are provided around the energy generation elements to receive particles produced by the ion milling of the electrode layer and the piezoelectric layer.</p> |
