LIGHT CURTAIN SYSTEM FOR ESTABLISHING A PROTECTIVE LIGHT CURTAIN, TOOL AND SYSTEM FOR PROCESSING OBJECTS AND METHOD FOR LOADING/UNLOADING A TOOL

摘要

It is described a light curtain system (50) for establishing a protective light curtain (51) for a tool (40) in a system (20) for processing objects such as wafers, particularly as a safety device for an operator of said tool (40). Said light curtain system (50) comprises a first light curtain component (53) of invisible light beams (54), said invisible light beams (54) being emitted by an emitter (55) and being directed and transmitted in parallel to each other towards a receiver (56), said receiver (56) being adapted for receiving and detecting the presence or absence of said invisible light beams (54), said receiver (56) being located spaced apart from said emitter (55), said receiver (56) and emitter (55) forming edges (52) of said protective light curtain (51). In addition, a second light curtain component (57) of visible light beams (58) is provided, said visible light beams (58) being directed and transmitted adjacent and in parallel to said light beams (54) of invisible light for forming a part of said protective light curtain (51) and for making said protective light curtain (51) visible for an operator, said second light curtain component (57) of visible light beams (58) being activated at least temporarily.