Production of a storage electrode of a deep trench capacitor comprises forming a doped layer above an exposed substrate which has been structured and then thermally treating

摘要

In the production of a storage electrode of a deep trench capacitor a doped layer is formed above an exposed substrate which has been structured and then thermally treatment is carried out. Production of a storage electrode of a deep trench capacitor comprises: preparing a substrate (200) with a hard mask layer (202) and an insulating layer (204); structuring the hard mask layer and the insulating layer to form a deep trench (206) with side walls (206a); forming an insulating layer in the trench; forming hard material distance spacers in the upper region of the trench above the insulating layer; removing the insulating layer to expose the substrate; forming a doped layer above the exposed substrate; and thermally treating to form a doped region in the substrate.