Apparatus for cathodic sputtering used in production of layers on substrate in vacuum chamber has components made of non-magnetic material arranged outside of apparatus, sputtering cathode, yoke, pole piece and substrate to be coated

摘要

Apparatus for cathodic sputtering has components made of non-magnetic material arranged outside of the apparatus, sputtering cathode (2), yoke (5), pole piece (3) and substrate (4) to be coated. Preferred Features: The non-magnetic material is made of Cr, Ni, Mo and/or brass. All ferromagnetic components are arranged concentrically to the sputtering cathode.