METHOD FOR MANUFACTURING ORGANIC LUMINESCENT ELEMENT HAVING MACHINED ANODE

摘要

PURPOSE: A method for manufacturing an organic luminescent element having a machined anode is provided to improve efficiency of an organic luminescent element by increasing a work function, and form a uniform surface by processing an ITO surface of the organic luminescent element with SF6 plasma. CONSTITUTION: An ITO is laminated on a glass substrate and washed. The washed ITO is machined with a plasma containing F on a surface thereof. A luminescent layer is formed on the ITO. A cathode is formed on at least one portion of the luminescent layer. The plasma is selected from the group consisting of SF6 plasma, CF4 plasma and CCl2F2 plasma. The ITO is washed with a DI water shower and through an ultrasonification washing in trichloroethylene. The plasma is operated at approximately 30W. Since the surface of the ITO which is an anode is processed with the SF6, plasma, CF4 plasma or CCl2F2 plasma, a work function of the anode is increased and thus injection of the organic luminescent element becomes easier, thereby increasing efficiency of the element.