| 摘要 |
PURPOSE: A pad of standard mechanical interface system is provided to prevent damage of wafer caused by combining defect of previous combining device fixing a pad plate with a cover in SMIF(Standard Mechanical Interface System) pad. CONSTITUTION: A locker(132) in a locking releasing state by the elasticity of a primary spring(136) is forwarded by using an outer locker handle of a locker housing(131). The locker rectilinearly moves when a combining groove moves to a position of a fixing pin of the outer face of the locker. Then, by the elasticity of a secondary spring(140), the fixing pin moves in the radial direction of the locker to fit the fixing pin to the combining groove of the locker for the fixing position of the locker. Herein, the apex of the locker passes through a pad cover to be inserted to a combining groove for coupling both sides. When releasing the fixing pin with a handle of the fixing pin pressed and the locker retreats by the elasticity of the primary spring to release a locking state.
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