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发明名称
Interconnection forming method
摘要
申请公布号
EP0529656(B1)
申请公布日期
2001.07.04
申请号
EP19920114754
申请日期
1992.08.28
申请人
SONY CORPORATION
发明人
KADOMURA, SHINGO
分类号
H01L21/302;H01L21/3065;H01L21/318;H01L21/3205;H01L21/321;H01L21/768;H01L23/52;(IPC1-7):H01L21/768
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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