发明名称 OPEN PATTERN REPAIR APPARATUS
摘要 PURPOSE: An open pattern repair apparatus is provided to uniform the surface of stored paste and to attach an application pin variably related on the thickness variation of the application surface. CONSTITUTION: The apparatus includes a straight translator(110), a motor(120), a storage tank(130), a vertical translator(150), an application pin support(160), and a paste height adjustor(170). The straight translator is implemented on one side of a base and makes a round trip between left and right. The motor is implemented on one side of the straight translator and generates a force. The storage tank is implemented on a rotational axis of the motor and has a disk-like shape having a predetermined height so as to hold the paste and detergent. The vertical translator is implemented on one side of the base and moves the application pin back and forth in a direction normal to a surface. The application pin support is implemented on the vertical translator and supports the application pin so as to move up and down. The paste height adjustor is implemented on one side of the tank so as to move up and down and maintains the height of the paste stored in the tank.
申请公布号 KR20010055190(A) 申请公布日期 2001.07.04
申请号 KR19990056304 申请日期 1999.12.09
申请人 LG ELECTRONICS INC. 发明人 PARK, IN TAE
分类号 H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/027
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