ALLOY ELECTRODE IN CAPACITOR AND METHOD FOR FORMING THE SAME

摘要

PURPOSE: An alloy electrode in a capacitor is provided to prevent oxidization of a barrier layer and degradation of a dielectric thin film using an alloy electrode without using metal and conductive oxide. CONSTITUTION: An alloy electrode in a capacitor includes a lower alloy electrode layer(22) consisting of a PtPu alloy layer on a semiconductor substrate(21). A surface oxide layer(23) functions as a barrier layer and consists of a RuO2 layer on the lower alloy electrode layer(22). A BST dielectric thin film layer(24) is formed on the surface oxide layer(23). An upper alloy electrode layer(25) consists of a PtRu alloy layer formed on the dielectric thin film layer(24).