Plasma process apparatus and method for process for a substrate,申请号GB20000025040-传众专利搜索

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法人/股东/高管

发明名称	Plasma process apparatus and method for process for a substrate
摘要
申请公布号	GB2357898(A)	申请公布日期	2001.07.04
申请号	GB20000025040	申请日期	2000.10.12
申请人	* MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD	发明人	KIYOSHI * ARITA;TETSUHIRO * IWAI;HIROSHI * HAJI
分类号	H01L21/302;C23F4/00;H01J37/32;H01L21/3065;H05H1/46;(IPC1-7):H01J37/32	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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