Production of electrodes used in production of stacked capacitor in DRAMs comprises forming a molded support structure in or on substrate, enlarging surface of structure; and forming electrodes using support structure

摘要

Production of electrodes in a micromechanical or microelectronic device comprises forming a molded support structure in or on a substrate (10); enlarging the surface of the structure; and forming the electrodes (150) using the support structure. Preferred Features: The structure is filled with electrode material using CVD, ALCVD galvanic deposition or a using a spin-on application. The electrode material is Pt, Ir, IrO2, Ru, RuO2, SrxRuyOz, W, WN, WSi, Ta, TaN, Ti, TiN, Mo, MoN or Al.