FINE PARTICLE COLLECTOR BY USING STATIC ELECTRICITY

摘要

PURPOSE: A fine particle collector by using static electricity is provided which charges foreign substances in a fluid passing through a separate device of a clean room or a semiconductor fabrication and collects the charged fine particles in the fluid having a size of sub-microns without any additional filter. CONSTITUTION: The device comprises: (i) a pipe(300) where a fluid is flowing; (ii) a first grounding terminal(310) which is installed on one side of the pipe and takes on the anode and collects the first fine particles being charged with negative(315) in the fluid; and (iii) a second grounding terminal(320) which is installed on the other side of the pipe and takes on the cathode and collects the second fine particles being charge with positive(325) in the fluid.