METHOD FOR PREPARING FIELD EMISSION MICROELECTRONIC DEVICE

摘要

PURPOSE: Provided is a method for preparing a field emission microelectronic device grows carbon nanotube on a soda lime glass base plate. CONSTITUTION: The method comprises steps of: (i) forming a lower part electrode(22), a resistance layer(23), an insulating film(24) and a gate layer(25) on a glass base plate(21) in sequence; (ii) after partly etching the gate layer and the insulating film through photo-etching to form a hole, forming a catalytic transition metal layer(26) on the upper part of the resistance layer of the hole bottom; and (iii) selectively heating the catalytic transition metal layer by the outside energy source with keeping the glass base plate at a relatively low temperature of 100-500 deg.C to selectively form carbon nanotubes(29) on the upper part of the catalytic transition metal layer.