| 摘要 |
PURPOSE: A thin film forming system for a flat panel display is provided to improve a productivity per unit device and unit time by synchronically forming a pattern of thin film on a plural of substrate. CONSTITUTION: A substrate feeding unit(12) is installed at the base(10) to move intermittently along to the length direction of base. The first through third film control units(14,14',14") are installed on the upper side of the base(10) to supply a film of each different kinds feeding each substrates by means of the substrate feeding unit(12). The first through third laser ablation units(16,16',16") are positioned on the upper plane of the through third film control units(14,14',14") for forming the first through third thin film pattern on the substrates. The film control unit(14) consists of the first roll winding the film, the second roll supplying for the spaced position of the first roll, the third roll and the forth roll supplying for the lower direction of the first roll and the second roll.
|
