| 摘要 |
PURPOSE: An active matrix device is provided to reduce the display unevenness of pixels in an active matrix type display device. CONSTITUTION: An active matrix device includes a plurality of source followers arranged at a pitch(d). The laser light illumination width(L) is equal to 3d. Two source followers are connected to each other in parallel. Representing a source follower matrix by(l, m), the laser light is first applied to source followers((p, q),(p+1, q),(p+2, q),(p,q+1),(p+1,q+1),(p+2, q+1)). The laser light is then moved so as to illuminate source followers((p+2,q),(p+3,q),(p+4,q),(p+2,q+1),(p+3,q+1),(p+4,q+1)). Actually, after the first laser irradiation, the substrate mounted on a X-Y table is moved and then the second irradiation is carried out. Further, a next laser irradiation is carried out onto the source followers((p+4,q),(P+5,q),(p+6, q),(p+4,q+1),(P+5,q+1),(p+6,q+1)).
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