发明名称
摘要 PURPOSE:To execute marking by the laser beam without reducing the work distance. CONSTITUTION:In a laser beam marking equipment where a mask 13 on which the prescribed pattern 12 is formed is irradiated with the laser beam outputted from a laser beam oscillator 11, and marking is executed by image-forming the laser beam transmitted from the pattern on a work by means of an image- forming lens 15, an optical element 14 which is formed of a material capable of transmitting the laser beam and is arranged on the outgoing side of the mask of the optical path of the laser beam with forming a plane by the incident and the outgoing planes, and a driving means 16 to sway this optical element at the prescribed angle of rotation are provided. This optical means refracts the laser beam according to the swaying angle.
申请公布号 JP3181407(B2) 申请公布日期 2001.07.03
申请号 JP19920325158 申请日期 1992.12.04
申请人 发明人
分类号 B23K26/00;B23K26/06;B41J2/44;B41M5/24;G02B26/08;G02B26/10;H01L23/00 主分类号 B23K26/00
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