EQUIPMENT FOR RECOVERING INERT GAS BY DRY VACUUM PUMP

摘要

PROBLEM TO BE SOLVED: To provide an inert gas recovering equipment in a single crystal lifting system which can minimize the loss of inert gas in recovery and does not require a larger equipment for refining. SOLUTION: As the rotor of a dry vacuum pump is made of a low-expansion alloy, the cooling process is not required. The exhaust gas is returned and purged near the pump outlet (just before going into the recovery line) for the purpose of preventing the dust accumulation that may adversely affect the rotor.