发明名称 Method for controlled removal of material from a solid surface
摘要 A catalytic method and an apparatus for selectively removing material from a solid substrate is provided. The method comprises contacting a surface of a solid substrate with a catalyst material in the presence of a reactant under conditions effective to selectively remove material from those areas of said solid substrate in contact with said catalyst material and said reactant.
申请公布号 US6254719(B1) 申请公布日期 2001.07.03
申请号 US19990416999 申请日期 1999.10.13
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHEEK ROGER W.
分类号 H01L21/306;H01L21/311;(IPC1-7):H01L21/302;C23F1/02 主分类号 H01L21/306
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