发明名称 |
Semiconductor device manufacturing apparatus having controller detecting function of filter |
摘要 |
A semiconductor device manufacturing apparatus. The semiconductor device manufacturing apparatus includes: a tank having an inlet and an outlet, for storing a chemical solution; a pump interposed between the inlet and outlet of the tank, for circulating the chemical solution contained in the tank; a filter interposed between the pump and the inlet of the tank; at least one main body connected to an outlet of the filter; a pumping cycle sensor for changing the pumping operation of the pump into a pulse signal; and a controller for measuring the cycle time of the pulse signals generated by the pumping cycle sensor to determine the level of deterioration of the filter.
|
申请公布号 |
US6254767(B1) |
申请公布日期 |
2001.07.03 |
申请号 |
US20000496949 |
申请日期 |
2000.02.03 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
SHIN SUNG-KI;HAH SANG-ROK |
分类号 |
B01D29/00;B01D17/12;H01L21/00;H01L21/304;H05F3/02;(IPC1-7):B01D17/12 |
主分类号 |
B01D29/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|